Journal of Vacuum Science and Technology B
Q3 Journal
Journal
Country
United States
Northern America
Subject Area and Category
Chemical Engineering
└
Condensed Matter Physics
Q3
└
Electrical and Electronic Engineering
Q3
└
Electronic, Optical and Magnetic Materials
Q3
Publisher
SJR 2025
0.359
Q3
SJR Score
H-Index
131
Citations / Doc (2yr)
1.55
Total Docs. (latest)
174
Total Citations (3yr)
829
Publication type
Journals
ISSN
21662746, 21662754
Coverage
1991-1992, 2009-2026
Journal Rank
#15,345
Subject Categories
Condensed Matter Physics
Q3
Electrical and Electronic Engineering
Q3
Electronic, Optical and Magnetic Materials
Q3
Instrumentation
Q3
Materials Chemistry
Q3
Process Chemistry and Technology
Q3
Surfaces, Coatings and Films
Q3
Detailed Metrics
| Total Docs. (latest) | 174 |
| Total Docs. (3 years) | 547 |
| Total Refs. | 5,705 |
| Total Citations (3 years) | 829 |
| Citable Docs. (3 years) | 543 |
| Citations / Doc. (2 years) | 1.55 |
| Ref. / Doc. | 32.79 |
| % Female | 23.7% |
Metrics Visualization
Latest year data vs 3-year cumulative figures
Publication & Citation Trend
Loading trend data from Crossref...
Top 10 Most Cited Articles
Loading articles...
Researcher Reviews
Write a ReviewNo reviews yet for this journal.
Be the first to share your experience!
Share Your Experience
Your review will be published after moderation. Email will not be displayed publicly.